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Part Number MPX10D

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WWW.MOTOROLA.COM/SEMICONDUCTORS
DL200/D
Rev. 5, 01/2003
Sensor
Device Data Book
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Freescale Semiconductor, Inc.
For More Information On This Product,
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DATA CLASSIFICATION
Product Preview
This heading on a data sheet indicates that the device is in the formative stages or in design (under development).
The disclaimer at the bottom of the first page reads: "This document contains information on a product under develop-
ment. Motorola reserves the right to change or discontinue this product without notice."
Advance or Preliminary Information
This heading on a data sheet indicates that the device is in sampling, preproduction, or first production stages. The
disclaimer at the bottom of the first page reads: "This document contains information on a new product. Specifications
and information herein are subject to change without notice."
Fully Released
A fully released data sheet contains neither a classification heading nor a disclaimer at the bottom of the first page.
This document contains information on a product in full production. Guaranteed limits will not be changed without
written notice to your local Motorola Semiconductor Sales Office.
MOTOROLA DEVICE CLASSIFICATIONS
In an effort to provide up-to-date information to the customer regarding the status of any given device, Motorola has
classified all devices into three categories: Preferred devices, Current products and Not Recommended for New
Design products.
A Preferred type is a device which is recommended as a first choice for future use. These devices are "preferred"
by virtue of their performance, price, functionality, or combination of attributes which offer the overall "best" value to
the customer. This category contains both advanced and mature devices which will remain available for the fore-
seeable future.
Preferred devices in the Data Sheet sections are
identified as a "Motorola Preferred Device.''
Device types identified as "current" may not be a first choice for new designs, but will continue to be available
because of the popularity and/or standardization or volume usage in current production designs. These products can
be acceptable for new designs but the preferred types are considered better alternatives for long term usage.
Any device that has not been identified as a "preferred device" is a "current" device.
Products designated as "Not Recommended for New Design" may become obsolete as dictated by poor market
acceptance, or a technology or package that is reaching the end of its life cycle. Devices in this category have an
uncertain future and do not represent a good selection for new device designs or long term usage.
The Sensor Data Book does not contain any
"Not Recommended for New Design" devices.
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Freescale Semiconductor, Inc.
For More Information On This Product,
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Sensor
Device Data Book
The information in this book has been carefully reviewed and is believed to be accurate; however, no responsibility
is assumed for inaccuracies. Furthermore, this information does not convey to the purchaser of semiconductor
devices any license under the patent rights to the manufacturer.
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no war-
ranty, representation, or guarantee regarding the suitability of its products for any particular purpose, nor does Motoro-
la assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and
all liability, including without limitation consequential or incidental damages. "Typical" parameters can and do vary in
different applications and actual performance may vary over time. All operating parameters, including "Typicals", must
be validated for each customer application by customer's technical experts. Motorola does not convey any license
under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use
as components in systems intended for surgical implant into the body, or other applications intended to support or
sustain life, or for any other application in which the failure of the Motorola product could create a situation where
personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or un-
authorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates,
and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising
out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized
use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola
and the Stylized M Logo are registered in the US Patent & Trademark Office. All other product or service names are
the property of their respective owners. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer.
5th Edition
©
Motorola, Inc. 2003
"All Rights Reserved"
Printed in U.S.A.
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Freescale Semiconductor, Inc.
For More Information On This Product,
Go to: www.freescale.com
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Freescale Semiconductor, Inc.
For More Information On This Product,
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TABLE OF CONTENTS
SECTION ONE -- General Information
Quality and Reliability
1­2
. . . . . . . . . . . . . . . . . . . . . . . . . . .
Overview
1­2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Reliability Issues for Silicon Pressure Sensors
1­3
. . . . . .
Soldering Precautions
1­10
. . . . . . . . . . . . . . . . . . . . . . . . . .
Pressure Sensors
1­11
. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Electrostatic Process Control
1­17
. . . . . . . . . . . . . . . . . .
Statistical Process Control
1­11
. . . . . . . . . . . . . . . . . . . . . .
Test Results
1­17
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Accelerometer
1­17
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Media Compatibility Overview
1­18
. . . . . . . . . . . . . . . . . . .
SECTION TWO -- Acceleration Sensor Products
Mini Selector Guide
2­2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Device Numbering System
2­2
. . . . . . . . . . . . . . . . . . . . . . .
Sensor Applications
2­3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Acceleration Sensor FAQ's
2­4
. . . . . . . . . . . . . . . . . . . . . . .
Data Sheets
MMA1200D
2­ 5
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MMA1201P
2­12
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MMA1220D
2­ 18
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MMA1250D
2­24
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MMA1260D
2­30
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MMA1270D
2­36
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MMA2201D
2­ 42
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MMA2202D
2­ 48
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MMA3201D
2­ 55
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Application Notes
AN1559
Application Considerations for a Switched
Capacitor Accelerometer
2­ 62
. . . . . . . . . . . . .
AN1611 Impact and Tilt Measurement
Using Accelerometer
2­65
. . . . . . . . . . . . . . . . . .
AN1612 Shock and Mute Pager Applications
Using Accelerometer
2­77
. . . . . . . . . . . . . . . . . .
AN1632 MMA1201P Product Overview
and Interface Considerations
2­ 84
. . . . . . . . . .
AN1635 Baseball Pitch Speedometer
2­ 89
. . . . . . . . . . . .
AN1640 Reducing Accelerometer
Susceptibility to BCI
2­101
. . . . . . . . . . . . . . . . .
AN1925 Using the Motorola Accelerometer
Evaluation Board
2­ 104
. . . . . . . . . . . . . . . . . . .
Case Outlines
2­107
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Glossary of Terms
2­109
. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SECTION THREE -- Pressure Sensor Products
Mini Selector Guide
3­2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Device Numbering System
3­4
. . . . . . . . . . . . . . . . . . . . . . .
Package Offerings
3­5
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Orderable Part Numbers
3­6
. . . . . . . . . . . . . . . . . . . . . . . . .
Pressure Sensor Overview
General Information
3­7
. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Motorola Pressure Sensors
3­8
. . . . . . . . . . . . . . . . . . . . . .
Integration
3­12
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Sensor Applications
3­13
. . . . . . . . . . . . . . . . . . . . . . . . . . .
Pressure Sensor FAQ's
3­14
. . . . . . . . . . . . . . . . . . . . . . . .
Data Sheets
MPX10, MPXV10GC Series
3­15
. . . . . . . . . . . . . . . . . . . .
MPX12 Series
3­19
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MPX2010, MPXV2010G Series
3­23
. . . . . . . . . . . . . . . . .
MPX2050 Series
3­27
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MPX2053, MPXV2053G Series
3­31
. . . . . . . . . . . . . . . . .
MPX2100 Series
3­35
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MPX2102, MPXV2102G Series
3­39
. . . . . . . . . . . . . . . . .
MPX2200 Series
3­43
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MPX2202, MPXV2202G Series
3­47
. . . . . . . . . . . . . . . . .
MPX2300DT1, MPX2301DT1
3­51
. . . . . . . . . . . . . . . . . . .
MPX4080D
3­54
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MPX4100 Series
3­59
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MPX4100A, MPXA4100A Series
3­64
. . . . . . . . . . . . . . . .
MPX4101A MPXA4101A, MPXH6101A Series
3­70
. . . .
MPX4105A Series
3­75
. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MPX4115A, MPXA4115A Series
3­79
. . . . . . . . . . . . . . . . .
MPX4200A Series
3­84
. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MPX4250A, MPXA4250A Series
3­88
. . . . . . . . . . . . . . . .
MPX4250D Series
3­93
. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MPX5010, MPXV5010G Series
3­97
. . . . . . . . . . . . . . . . .
MPX5050, MPXV5050G Series
3­103
. . . . . . . . . . . . . . . .
MPX5100 Series
3­108
. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MPX53, MPXV53GC Series
3­114
. . . . . . . . . . . . . . . . . . .
MPX5500 Series
3­118
. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MPX5700 Series
3­122
. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MPX5999D
3­126
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MPXA6115A, MPXH6115A
3­130
. . . . . . . . . . . . . . . . . . . .
MPXAZ4100A Series
3­135
. . . . . . . . . . . . . . . . . . . . . . . . .
MPXAZ4115A Series
3­140
. . . . . . . . . . . . . . . . . . . . . . . . .
MPXAZ6115A Series
3­145
. . . . . . . . . . . . . . . . . . . . . . . . .
MPXC2011DT1, MPXC2012DT1
3­150
. . . . . . . . . . . . . . .
MPXH6300A Series
3­153
. . . . . . . . . . . . . . . . . . . . . . . . . .
MPXM2010 Series
3­158
. . . . . . . . . . . . . . . . . . . . . . . . . . .
MPXM2053 Series
3­161
. . . . . . . . . . . . . . . . . . . . . . . . . . .
MPXM2102 Series
3­164
. . . . . . . . . . . . . . . . . . . . . . . . . . .
MPXM2202 Series
3­167
. . . . . . . . . . . . . . . . . . . . . . . . . . .
MPXV4006G Series
3­170
. . . . . . . . . . . . . . . . . . . . . . . . . .
MPXV4115V Series
3­174
. . . . . . . . . . . . . . . . . . . . . . . . . . .
MPXV5004G Series
3­179
. . . . . . . . . . . . . . . . . . . . . . . . . .
MPXV6115VC6U
3­183
. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Application Notes
AN935
Compensating for Nonlinearity in the
MPX10 Series Pressure Transducer
3­188
. . .
AN936
Mounting Techniques, Lead Forming
and Testing of Motorola's MPX Series
MPX10 Series Pressure Sensors
3­195
. . . . . .
AN1082 Simple Design for a 3­20 mA Transmitter
Interface Using a Motorola
Pressure Sensor
3­200
. . . . . . . . . . . . . . . . . . . .
(continued -- next page)
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Freescale Semiconductor, Inc.
For More Information On This Product,
Go to: www.freescale.com
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