MPXM2053 SERIES

Sensor Device Data

Freescale Semiconductor

50 kPa

On- Chip Temperature

Compensated & Calibrated

Silicon Pressure Sensors

The MPXM2053 device is a silicon piezoresistive pressure sensor providing a highly

accurate and linear voltage output -- directly proportional to the applied pressure. The
sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin--film
resistor network integrated on--chip. The chip is laser trimmed for precise span and offset
calibration and temperature compensation.
Features
· Temperature Compensated Over 0°C to +85°C
· Available in Easy--to--Use Tape & Reel
· Ratiometric to Supply Voltage
· Gauge Ported & Non Ported Options
Application Examples
· Pump/Motor Controllers
· Robotics
· Level Indicators
· Medical Diagnostics
· Pressure Switching
· Non--Invasive Blood Pressure Measurement

Figure 1 shows a block diagram of the internal circuitry on the stand--alone pressure

sensor chip.

Figure 1. Temperature Compensated Pressure Sensor Schematic

X--ducer

SENSING

ELEMENT

THIN FILM

TEMPERATURE

COMPENSATION

AND

CALIBRATION

CIRCUITRY

out+

out--

GND

VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE

The differential voltage output of the sensor is directly proportional to the differential

pressure applied.

The output voltage of the differential or gauge sensor increases with increasing

pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).

Preferred devices are Freescale Semiconductor recommended choices for future use and best overall value.

MPXM2053

Rev. 2, 10/2004

Freescale Semiconductor

Technical Data

MPXM2053

SERIES

0 to 50 kPa (0 to 7.25 psi)

40 mV FULL SCALE SPAN

(TYPICAL)

PIN NUMBER

1
2

Gnd

out

3
4

--V

out

Freescale Semiconductor Preferred Device

MPXM2053D/DT1

CASE 1320

MPXM2053GS/GST1

CASE 1320A

SCALE 1:1

MPAK PACKAGE

Sensor Device Data

Freescale Semiconductor

MPXM2053 SERIES

MAXIMUM RATINGS

(NOTE)

Rating

Symbol

Value

Unit

Maximum Pressure (P1 > P2)

max

200

kPa

Storage Temperature

stg

--40 to +125

°C

Operating Temperature

--40 to +125

°C

NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.

OPERATING CHARACTERISTICS

= 10 Vdc, T

= 25°C unless otherwise noted, P1 > P2)

Characteristic

Symbol

Min

Typ

Max

Unit

Pressure Range

(1)

kPa

Supply Voltage

(2)

Vdc

Supply Current

6.0

mAdc

Full Scale Span

(3)

FSS

38.5

41.5

Offset

(4)

off

--1.0

1.0

Sensitivity

V/P

0.8

mV/kPa

Linearity

(5)

--0.6

0.4

FSS

Pressure Hysteresis

(5)

(0 to 50 kPa)

±0.1

FSS

Temperature Hysteresis

(5)

(--40°C to +125°C)

±0.5

FSS

Temperature Effect on Full Scale Span

(5)

TCV

FSS

--2.0

2.0

FSS

Temperature Effect on Offset

(5)

TCV

off

--1.0

1.0

Input Impedance

1000

2500

Output Impedance

out

1400

3000

Response Time

(6)

(10% to 90%)

1.0

Warm--Up

Offset Stability

(7)

±0.5

FSS

NOTES:

1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional

error due to device self--heating.

3. Full Scale Span (V

FSS

) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

minimum rated pressure.

4. Offset (V

off

) is defined as the output voltage at the minimum rated pressure.

5. Accuracy (error budget) consists of the following:

· Linearity:

Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.

· Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is

cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.

· Pressure Hysteresis:

Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.

· TcSpan:

Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.

· TcOffset:

Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.

6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to

a specified step change in pressure.

7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

MPXM2053 SERIES

Sensor Device Data

Freescale Semiconductor

LINEARITY

Linearity refers to how well a transducer's output follows

the equation: V

out

= V

off

+ sensitivity x P over the operating

pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the "best case" linearity error (lower numerical value), the
calculations required are burdensome.

Conversely, an end point fit will give the "worst case" error

(often more desirable in error budget calculations) and the cal-
culations are more straightforward for the user. Freescale
Semiconductor's specified pressure sensor linearities are
based on the end point straight line method measured at the
midrange pressure.

Figure 2. Linearity Specification Comparison

LEAST
SQUARE
DEVIATION

RELA

VOL

T
AGE

UTPUT

PRESSURE (% FULLSCALE)

100

END POINT

STRAIGHT LINE FIT

EXAGGERATED

PERFORMANCE

CURVE

LEAST SQUARES FIT

STRAIGHT LINE

DEVIATION

OFFSET

ON--CHIP TEMPERATURE COMPENSATION and CALIBRATION

Figure 3 shows the minimum, maximum and typical output

characteristics of the MPXM2053 series at 25°C. The output

is directly proportional to the differential pressure and is es-
sentially a straight line.

A silicone gel isolates the die surface and wire bonds from

the environment, while allowing the pressure signal to be
transmitted to the silicon diaphragm.

Figure 3. Output versus Pressure Differential

OUTPUT

(
m

Vdc

)

kPa

PSI

40
35
30
25

15
10

5
0

--5

12.5

1.8

3.6

37.5

5.4

7.25

SPAN

RANGE

(TYP)

OFFSET

(TYP)

MAX

TYP

MIN

= 10 Vdc

= 25°C

P1 > P2

ORDERING INFORMATION

Device Type

Options

Case No

Device Type

Options

Case No.

MPXM2053D

Non--ported

1320

MPXM2053DT1

Non--ported, Tape and Reel

1320

MPXM2053GS

Ported

1320A

MPXM2053GST1

Ported, Tape and Reel

1320A

Sensor Device Data

Freescale Semiconductor

MPXM2053 SERIES

PACKAGE DIMENSIONS

CASE 1320--02

ISSUE A

MPAK, STYLE 1

DIM

MIN

MAX

INCHES

.155

.165

.002

.010

.014

.018

.120

.130

.245

.255

.475

.485

e/2

.038

.048

.325

.335

.025 BSC

.050 BSC

NOTES:

1. DIMENSIONS ARE IN INCHES.

2. INTERPRET DIMENSIONS AND TOLERANCES PER

ASME Y14.5M--1994.

3. DIMENSIONS "D" AND "E1" DO NOT INCLUDE MOLD

FLASH OR PROTRUSION. MOLD FLASH OR

PROTRUSION SHALL NOT EXCEED .006" PER SIDE.

4. ALL VERTICAL SURFACES TO BE 5° MAXIMUM.

5. DIMENSIONS "b" DOES NOT INCLUDE DAMBAR

PROTRUSION. ALLOWABLE DAMBAR PROTRUSION

SHALL BE .008 MAXIMUM.

e/2

0.004

0.006

0.004

DETAIL E

SEATING

PLANE

GAGE

PLANE

DETAIL E

.014

PIN 1

PIN 4

STYLE 1:

PIN 1. GND

2. +Vout

3. Vs

4. --Vout

MPXM2053 SERIES

Sensor Device Data

Freescale Semiconductor

PACKAGE DIMENSIONS

CASE 1320A--02

ISSUE O

MPAK, STYLE 1

DIM

MIN

MAX

INCHES

.377

.397

.002

.010

.014

.018

.120

.130

.245

.255

.475

.485

e/2

.013

.023

.325

.335

.025 BSC

.050 BSC

NOTES:

1. DIMENSIONS ARE IN INCHES.

2. INTERPRET DIMENSIONS AND TOLERANCES PER

ASME Y14.5M--1994.

3. DIMENSIONS "D" AND "E1" DO NOT INCLUDE MOLD

FLASH OR PROTRUSION. MOLD FLASH OR

PROTRUSION SHALL NOT EXCEED .006" PER SIDE.

4. ALL VERTICAL SURFACES TO BE 5° MAXIMUM.

5. DIMENSIONS "b" DOES NOT INCLUDE DAMBAR

PROTRUSION. ALLOWABLE DAMBAR PROTRUSION

SHALL BE .008 MAXIMUM.

e/2

0.004

0.006

0.004

DETAIL E

SEATING

PLANE

GAGE

PLANE

DETAIL E

.014

.283

.293

.363

.373

.107

.117

.192

.202

Sensor Device Data

Freescale Semiconductor

MPXM2053 SERIES

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MPXM2053
Rev. 2
10/2004

Part Number MPXM2053